Laser Thomson Scattering Diagnostics of Dielectric Barrier Discharge Plasmas

Applications of Thomson scattering diagnostics to two kinds of dielectric barrier discharge (DBD) plasmas are presented. One is that for the plasma display panel. In order to avoid laser perturbations for Xe containing discharges which are easily disturbed by laser beams with visible wavelengths, a laser Thomson scattering (LTS) system having an infrared laser (wavelength 1064 nm) as a light source has been developed. The other is the capacity coupled discharge (CCD) which was produced between needle and sphere electrodes. Electron densities and electron temperatures of CCD plasmas were evaluated quantitatively for the first time.